| 摘要 |
PROBLEM TO BE SOLVED: To provide a trap device devised to be capable of improving reliability as a device by improving trap efficiency of a product or regenerating efficiency of an attached product. SOLUTION: Hydrophilic treatment is applied on a surface of a trap part 36 on a trap device having the trap part 36 arranged in an exhaust route 14 to exhaust air by a vacuum pump 12 from an airtight chamber 10 and to remove a product in exhaust gas by attaching it on it.
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