发明名称 Halogenfreie Polyarylenetherdielectrika
摘要 <p>Poly(arylene ether) polymers comprising a repeat unit of the structure: <CHEM> wherein m = 0 to 1.0, and n = 1.0 - m; and Ar1, Ar2, Ar3 and Ar4 are individually non-functionalized divalent arylene radicals are dielectric materials for use in microelectronic devices. Preferably said divalent radicals are selected from certain phenylene, biphenylene, triphenylene, naphthalene, anthracene, phenanthrene, 9,9-diphenylfluorene and dibenzofuran diradicals.</p>
申请公布号 DE69610674(T2) 申请公布日期 2001.05.17
申请号 DE1996610674T 申请日期 1996.07.11
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 BURGOYNE, JR.;VRTIS, RAYMOND NICHOLAS;ROBESON, LLOYD MAHLON
分类号 C08G65/34;C08G65/40;C08L71/00;H01L21/312;H01L23/498;H01L23/532;(IPC1-7):C08G65/40;H01L23/29 主分类号 C08G65/34
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