| 摘要 |
PROBLEM TO BE SOLVED: To form a dynamic pressure generating groove on a ceramic dynamic pressure fluid bearing with high accuracy, and to reduce the production of particles. SOLUTION: At least one of a shaft and a sleeve is made of ceramic, an area occupation ratio of voids on a sliding surface is below 3%, the number of voids having diameters below 5μm is above 70% to the total voids, the number of voids having diameters of 5-20μm is below 25% to the total voids, and the number of voids having diameters of 20-50μm is below 5% to the total voids.
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