| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a fan filter unit used in a clean room, in which a simplified diffusing plate is employed to uniformly distribute the air velocity at the time of passing a filter. SOLUTION: A fan filter unit comprises a blower 2, a chamber 3 and a filter 4 disposed in this order from the upstream in a case 1, and comprises a diffusing plate 5 of a punching metal material at a position which is 5 to 10 mm distanced from the surface of the filter 4, being parallel therewith, at the downstream side in the chamber 3. Thus the airflow of the blower can be uniformly dispersed and regulated, thereby attaining an effect of raising dust collecting efficiency and prolonging the life of the filtering member.</p> |
