| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem such that the production of a large-size phosphor is difficult since a phosphor comprising terbium oxide having fluorescent functions and incorporated into glass is produced by melting glass in a crucible followed by casting. SOLUTION: A phosphor is produced by covering a glass plate with a fluorescent thin film comprising, based on metal oxides, 40-80 mol% SiO2+GeO2+B2 O3+Al2O3+Ga2O3, 0-80 mol% SiO2+GeO2, 0-70 mol% B2O3+Al2O3+Ga2O3, 0-30 mol% MgO+CaO+SrO+BaO, 0.1-20 mol% Ln2O3, and 0-3 mol% Sb2O3+Bi2 O3, provided Ln is at least one kind of lanthanoid element. The fluorescent thin film is formed by magnetron sputtering; a magnetron sputtering method conducted while the potential between a pair of targets is being inverted by alternate current is especially suitable.
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