| 摘要 |
PROBLEM TO BE SOLVED: To provide an SQUID element having a step type Josephson junction which allows the cost down of elements and the use of a large-area substrate. SOLUTION: An oxide superconductor thin film pattern 20 is formed through a CeO2 buffer layer on a sapphire substrate 10 having a step 11 formed such that the step 11 traverses specified regions of a square thin film pattern 22 having an opening 23 at the center, and step type Josephson junction 26, 27 are formed at the regions where the step 11 traverses. Thus, an SQUID is obtained. The sapphire substrate is comparatively manufactured at a low cost and may develop a large substrate.
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