| 摘要 |
PROBLEM TO BE SOLVED: To uniformly etch the layer to be etched deposited on the surface of the sheet material to be etched. SOLUTION: The inside of a vessel 1 is provided with a carrying means 2, the vessel 1 is provided with spray tubes 6 and 7 so as to be capable of rotation, the spray tubes 6 and 7 are respectively provided with many spray nozzles, the outside of the vessel 1 is provided with turbo-blowers 11, the suction tube 12 of the turbo-blower 11 is connected to the inside of the vessel 1, a discharge tube 13 of the turbo-blower 11 is connected with plural feed tubes 14, the feed tube 14 is connected with an air injection nozzle 15, and the air injection nozzle 15 is located in the vicinity of the carrying means 2 and also between the spray nozzles in the carrying direction of the carrying means 2.
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