CHARACTERISTIC ESTIMATION CIRCUIT FOR SEMICONDUCTOR WAFER AND ESTIMATING METHOD THEREOF

摘要

PURPOSE: A characteristic estimation method for a semiconductor wafer is provided to easily destruct or disable a characteristic estimation circuit, by installing the characteristic estimation circuit in a scribe region between semiconductor chips or in a characteristic estimation region having the same size as the semiconductor chip. CONSTITUTION: A proper voltage is applied to a gate voltage control pad(P8,P9,P10) to turn off a depletion-type metal-oxide-semiconductor(MOS) transistor(501,502,503). A probe is placed on the pad to estimate the characteristic of a dummy device after the proper voltage is applied to the gate voltage control pad. A fuse(F8,F9,F10) connected to the gate of the depletion-type MOS transistor is cut after the dummy device is estimated.