发明名称 METHOD AND APPARATUS FOR GASIFYING LIQUID MATERIAL
摘要 PURPOSE: A method and an apparatus for gasifying a liquid material are provided by which gasification of liquid material can be made efficiently and in stabilized state at all times. CONSTITUTION: The apparatus comprises mixing a liquid material(LM) and a carrier gas(CG) while making flow control in a gas-liquid mixing unit(39) in a control valve provided with a liquid flow control function, and discharging the resulting gas-liquid mixture(M) from the nozzle(42) formed in the vicinity of the flow control unit(39) to gasify the liquid material(LM) under reduced pressure.
申请公布号 KR20010030372(A) 申请公布日期 2001.04.16
申请号 KR20000053937 申请日期 2000.09.14
申请人 STEC INC. 发明人 MIYAMOTO HIDEAKI;NISHIZATO HIROSHI
分类号 F17C7/00;B01D3/34;B01F3/02;B05B7/04;C23C16/00;C23C16/448;H01L21/205;H01L21/31;(IPC1-7):C23C16/00 主分类号 F17C7/00
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