发明名称 |
METHOD AND APPARATUS FOR GASIFYING LIQUID MATERIAL |
摘要 |
PURPOSE: A method and an apparatus for gasifying a liquid material are provided by which gasification of liquid material can be made efficiently and in stabilized state at all times. CONSTITUTION: The apparatus comprises mixing a liquid material(LM) and a carrier gas(CG) while making flow control in a gas-liquid mixing unit(39) in a control valve provided with a liquid flow control function, and discharging the resulting gas-liquid mixture(M) from the nozzle(42) formed in the vicinity of the flow control unit(39) to gasify the liquid material(LM) under reduced pressure.
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申请公布号 |
KR20010030372(A) |
申请公布日期 |
2001.04.16 |
申请号 |
KR20000053937 |
申请日期 |
2000.09.14 |
申请人 |
STEC INC. |
发明人 |
MIYAMOTO HIDEAKI;NISHIZATO HIROSHI |
分类号 |
F17C7/00;B01D3/34;B01F3/02;B05B7/04;C23C16/00;C23C16/448;H01L21/205;H01L21/31;(IPC1-7):C23C16/00 |
主分类号 |
F17C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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