发明名称 |
SEMICONDUCTOR DEVICE, DESIGNING METHOD THEREOF AND COMPUTER-READABLE RECORDING MEDIUM HAVING STORED DESIGNING PROGRAMS |
摘要 |
PURPOSE: To provide a semiconductor device having a high integration degree with a small number of poor contacts of metal wirings with via contacts and a designing method thereof. CONSTITUTION: The device has via contacts 1, 2 and main wirings 3-6 connected to the via contacts and the ends. It has coverage wirings 7-10 having a line width not wider than that of the main wirings and the wirings 7-10 follow the ends of the main wirings 3-6 and expand from the via contacts 1-2 in only a parallel direction to the wiring direction of the main wirings 3-6. Owing to the coverage wirings 7-10 having a line width not wider than that of the main wirings, rounding the ends of the main wirings 3-6 can be suppressed, the line width broadening of the main wirings 3-6 around the via contacts 1-2 can be suppressed and hence other main wirings or other via contacts may be disposed on designed grids or grid points adjacent the via contacts 1-2, without violating design rules. |
申请公布号 |
KR20010030379(A) |
申请公布日期 |
2001.04.16 |
申请号 |
KR20000053998 |
申请日期 |
2000.09.14 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KIMURA KENJI;MAENO MUNEAKI;SEI TOSHIKAZU |
分类号 |
H01L23/522;G03F1/68;G03F1/70;G06F17/50;H01L21/00;H01L21/768;H01L21/82;H01L23/48;H01L23/52;H01L23/528;H01L27/00;H01L29/40;(IPC1-7):H01L21/768 |
主分类号 |
H01L23/522 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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