| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inexpensive device which uses a cold cathode electron source that can generate a high density emission of electric current at low voltage and has characteristics such as easy in vacuum evacuation and easy in vacuum maintenance. SOLUTION: In a cold cathode electron source using a cold cathode material such as a carbon nano-tube and the like that enables an electron emission in a low electric field, necessary parts are placed on each of unbaked ceramic sheets (green sheets 21, 43, and 46) and are laminated and baked to be made into one body. In a manufacturing method of the electron source, through holes 20 are made on a flat plane for conductive paste 30 wherein carbon nano-tubes 31 are distributed to be sucked and filled therein, as a result, the carbon nano- tubes 31 can be easily oriented in the direction of the through hole 20.</p> |
