| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch sensor which allows measuring of the fine surface shape by setting the axial resonance vibration of a stylus completely only in the axial component. SOLUTION: A stylus 1 has a structure substantially symmetrical about the axial direction. Stylus side support parts 10-13 of support members 6-9 for connecting the stylus 1 to a stylus holder 5 are symmetrical with respect to the axial direction of the stylus to the center of gravity 3 of the stylus in plural portions, and further symmetrical about the axis 4 of the stylus in each portion in plural portions. The center of gravity of support member of each set in the same portion in the axial direction of the stylus is substantially on the axis. At least either a vibration exciting means 31 or a detecting means 32 is provided to be stretched between two portions, at least on the stylus which are at equal distance from the center of gravity 3.
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