| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection device obtaining a defect detecting image by the light quantity optimal for picking up the image of a sample. SOLUTION: A selection range 14 is designated on a pick-up image of a sample 2 on a stage 1, the maximum light quantity is detected in the selection range 14, and the brightness of a lamp 6 in the selection range is set to the light quantity optimal for the picking up the image of a first camera 8 and a second camera 9 from the maximum light quantity.
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