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发明名称
摘要
申请公布号
JP3152249(B2)
申请公布日期
2001.04.03
申请号
JP19910349276
申请日期
1991.12.05
申请人
发明人
分类号
C23C14/08;C23C14/54;C23C16/40;(IPC1-7):C23C14/54
主分类号
C23C14/08
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代理人
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