METHOD OF INSPECTING SAMPLE, AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To raise the inspection efficiency in the detailed inspection of a defect being performed based on the information on defect inspection. SOLUTION: For example, a foreign matter or defect detected by a defect inspection device 1 is inspected in detail with a detailed inspection device 3 using an SEM or the like to elucidate the cause of its occurrence, but before detailed inspection, the foreign matter or the defect detected with the defect inspection device 1 is inspected with an attribute inspection device 1, using an optical microscope or the like to obtain each attribute. Based on this attribute, these defects or foreign matters are divided into ones requiring detailed inspection and ones which to not require the detailed inspection or being impossible of detailed inspection, and only the foreign matters or the defects requiring the detailed inspection are inspected by detailed inspection device 3.