| 摘要 |
PURPOSE: To provide a reduced pressure surface treating device with which the constitution to enhance treatment efficiency is attained by an inexpensive mechanism and which is particularly suitable for treating large-sized substrates, such as substrates for solar batteries. CONSTITUTION: A vacuum vessel 1 has openings for a belt so that the belt 21 moves between the atm. side and the inside of this vacuum vessel 1. The vacuum vessel 1 is segmented to plural treating chambers 111, 112, 113 which respectively have treating sections 3. The substrates 20 are placed on the belt 21 and are successively transported to the respective treating chambers 111, 112, 113 where the substrates are treated. Sealing means 6 using sealing liquids are disposed in the openings for the belt. The belt 21 is formed of a sheet-like metal and heating means 7 are disposed on the rear side of the belt 21. |
