| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of an optical waveguide in which the upper face of the upper clad layer can be easily flattened although the optical waveguide is made of a resin. SOLUTION: The waveguide consists of a substrate 14, a lower clad layer 15, a core layer 16 formed on part of the lower clad layer 15, an upper clad layer 20 covering the core layer 16, and a flattening layer 24 covering the upper face of the upper clad layer 20. The upper clad layer 20 and the flattening layer 24 consist of a resin, and the resin constituting the flattening layer 24 has a lower glass transition temperature than that of the resin constituting the upper clad layer 20. |
