| 摘要 |
PROBLEM TO BE SOLVED: To prevent the adhesion of unconverted gas or reaction products in a process, in a mechanism for sealing a rotating shaft by using a magnetic fluid seal. SOLUTION: A magnetic fluid sealing rotary introducer, provided with a mechanism for sealing a rotating shaft communicated to a vacuum chamber A by a seal step through plural magnetic fluids 6, is a device for preventing the adhesion of unconverted gas or reaction products, etc., by a heater 9 incorporated or externally fitted to a seal. In this case, the temperature of a target can be controlled freely by detecting temperature through a thermostat incorporated in a heater 9 and the temperature can be controlled by using a thermocouple.
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