| 摘要 |
PROBLEM TO BE SOLVED: To highly efficiently manufacture a high quality product by quickly performing control for obtaining a beam projecting area of a size, suitable for the object to be irradiated of a rare-gas excimer laser on the laser side. SOLUTION: When a reflecting mirror 3 is rotated as shown by the arrow 3a in the directions shown by, moved in the directions shown by the arrows 3b and 3c, or in the combined directions shown by the arrows 3a, 3b, and 3c, the direction of incidence of an exciting laser beam L1 reflected by the mirror 3 to a laser chamber 1 changes. Consequently, the incident direction of the laser beam L1 to a cylindrical convex mirror 4 is changed, and further, the incident direction of an exciting laser beam L2 to a cylindrical concave mirror 4-2 is changed. In addition, the position of the area 5, to which the laser beam L2 reflected by the mirror 4-2 is condensed, changes. Consequently, the beam- emitting position of a rare-gas excimer laser changes. Moreover, the total cross- sectional area of the beams emitted from the rare-gas excimer laser becomes a desired value. |
