MACHINING METHOD USING CONVERGENT ION BEAM

摘要

PROBLEM TO BE SOLVED: To shorten the time required for sputter-etching by projecting convergent ion beams of a plurality of convergent ion beam lens-barrels to a sample at the same time. SOLUTION: Two convergent ion beam lens-barrels are fitted to a sample chamber 23. A first convergent ion beam lens-barrel 21 is set at such position as a sample 25 which is horizontally set is irradiated with vertical ion beam. A second convergent ion beam lens-barrel 22 is set at a different angle, for example tilted by 60 deg.. The centers of ion beams of convergent ion beam lens- barrels cross each other on the surface of sample 25 placed on a sample stage 24. By setting the height of a sample surface to the cross point of convergent ion beams, the projection point of convergent ion beams of two convergent ion beam lens-barrels is at the same position on the sample surface.