发明名称 MOLD MANUFACTURE FOR CUTTING SAMPLE AND ITS MOLD MANUFACTURE JIG
摘要 PROBLEM TO BE SOLVED: To adjust colored mold agent by constituting the method of a process for covering a sample for cutting with a first mold agent and a process for covering the outside thereof with a second mold agent. SOLUTION: A container for storing a sample 4 for cutting inside is made integral by uniting a container lid 1 to a container 5 of a first colored mold agent, and an edge of a discharge port 2 provided to the container lid 1 is made tubular. After colored mold agent is poured into the container 5, extra colored mold agent is discharged from the discharge port 2 when vacuum defoaming is carried out. A sample 4 covered with the colored mold agent container 5 is put in a container of a second transparent mold agent. In the process, the amount of colored mold agent to be discharged can be adjusted by adjusting the height 3 of the discharge port 2.
申请公布号 JP2001077134(A) 申请公布日期 2001.03.23
申请号 JP19990253523 申请日期 1999.09.07
申请人 NEC CORP 发明人 WATABE MINEYOSHI
分类号 H01L21/56;G01R31/26;H01L21/66;H01L23/29;H01L23/31;(IPC1-7):H01L21/56 主分类号 H01L21/56
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