发明名称 METHOD OF FORMING A CONDUCTIVE PATTERN ON DIELECTRIC SUBSTRATES
摘要 The aim of the invention is to produce a conductor pattern on dielectric substrates. According to the inventive method a) a substrate that is coated with a metal layer is coated with a protective layer which is produced by treating the metal layer with a solution containing at least one compound which contains nitrogen; b) the protective layer is at least partially remov ed by means of UV radiation in the areas that do not correspond to the conducto r pattern in such a way that the metal layer is uncovered, whereby said conductor pattern is to be produced and c) the uncovered metal layer is subsequently removed by etching. Extremely fine conductor patterns can be produced on dielectric substrates in a reproducible manner by means of the inventive method.
申请公布号 CA2382916(A1) 申请公布日期 2001.03.22
申请号 CA20002382916 申请日期 2000.07.18
申请人 ATOTECH DEUTSCHLAND GMBH 发明人 GUGGEMOS, MICHAEL;KOHNLE, FRANZ
分类号 C25D9/02;C23F1/00;C23F1/02;H05K3/00;H05K3/06;(IPC1-7):C23F1/02 主分类号 C25D9/02
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