METHOD FOR MAKING A THIN FILM OF SOLID MATERIAL,申请号KR1020007000860-传众专利搜索

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发明名称	METHOD FOR MAKING A THIN FILM OF SOLID MATERIAL
摘要
申请公布号	KR20010022284(A)	申请公布日期	2001.03.15
申请号	KR1020007000860	申请日期	2000.01.26
申请人		发明人
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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