发明名称 |
FEEDBACK CIRCUIT FOR MICROMACHINED ACCELEROMETER |
摘要 |
An accelerometer comprises a movable electrode between two fixed electrodes to form a differential capacitor. Drivers provide AC drive signals with phase shift of 180 DEG to the fixed electrodes. The movable electrode is coupled through reading circuitry to an output terminal. In response to a sensed acceleration, feedback is provided from the output terminal to one or both drivers to null any AC signal on the movable electrode by modifying the amplitudes of the drive signals and to keep the electrostatic forces between the movable electrode and each of the fixed electrodes equal. |
申请公布号 |
WO0116606(A1) |
申请公布日期 |
2001.03.08 |
申请号 |
WO2000US23534 |
申请日期 |
2000.08.25 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
HOLLOCHER, DAVID, C.;MEMISHIAN, JOHN |
分类号 |
G01P15/125;G01P15/13;G01P15/18 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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