发明名称 Semiconductor chip mounting apparatus capable of preventing connected portion between semiconductor chip and substrate from thermal stress and method thereof
摘要 In a semiconductor chip mounting apparatus including a mounting section for mounting a semiconductor chip on a substrate, a loader which supplies the substrate to the mounting section, an unloader which contains the substrate having the semiconductor chip mounted thereon into a magazine, the substrate having the semiconductor chip is heated by a heater to be kept at high temperature after the mounting process and until a sealing process for sealing the substrate having the mounted semiconductor chip with a resin.
申请公布号 US6197612(B1) 申请公布日期 2001.03.06
申请号 US19980177376 申请日期 1998.10.23
申请人 NEC CORPORATION 发明人 WATANABE SHINJI
分类号 H01L21/60;H01L21/00;H01L21/50;H01L21/56;(IPC1-7):H01L21/44 主分类号 H01L21/60
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