发明名称 EVAPORATION TUBE AND EVAPORATION APPARATUS WITH ADAPTED EVAPORATION CHARACTERISTIC
摘要 An evaporation crucible is described. The evaporation crucible includes: an electrically conductive chamber tube ( 120 ) having a wall such that an enclosure is formed, the chamber tube having a tube axis; a first electrical connection ( 162; 182 ); a second electrical connection; at least one feeding opening ( 134 ); and at least one distributor orifice ( 170; 470; 670 ) of the chamber tube, wherein the enclosure includes a melting-evaporation area.
申请公布号 US2008216749(A1) 申请公布日期 2008.09.11
申请号 US20080043901 申请日期 2008.03.06
申请人 APPLIED MATERIALS, INC. 发明人 AULBACH HOLGER
分类号 C23C16/44 主分类号 C23C16/44
代理机构 代理人
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