STAGE DEVICE OF TRIAXIAL MOTION

摘要

PURPOSE: A triaxial motion stage device is provided to conveniently use and to obtain repeatability and resolution by omitting a separate alignment procedure. CONSTITUTION: Plural actuators(12) are Z-axis movably installed in a main body(11). An upper plate(13) having a recessed groove(13a) settling a sample is spot-contacted to an end portion of the actuator and is supported by a stage(10). After establishing the upper plate position, a computer(30) calculates a position of each actuator based on PID(proportional integral and derivative action) method of a closed loop. A position is controlled to a requested location according to the calculation result by the computer. Thus, high repeatability and resolution are obtained because the device structure is comparatively simple and a special alignment procedure is not needed.