| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a semiconductor wafer treatment operation to be carried out keeping wafers free from contamination by a method wherein a lid is automatically opened or closed without using the manpower. SOLUTION: A box 10 has such a structure where the hooked parts 26a and 26b of elastic hook pieces 24a and 24b are pressed inward to be press- engaged with hook parts 20a and 20b to enable the lid 16 to be locked when a lid 16 is kept being fit in an opening 12, by which the lid 16 is mounted at the opening 12 so as not to fall off the opening 12, and on the other hand, when the lid 16 is put on the opening 12, the hooked parts 26a and 26b of elastic hook pieces 24a and 24b are pulled outward so as to be disengaged from the hook parts 20a and 20b, and then the lid 16 is moved up so as to be unlocked and dismounted from the opening 12. The box 10 is arranged at a prescribed position, and the lid 16 is automatically mounted on or dismounted from the box 10.</p> |
