| 摘要 |
PURPOSE: A lot supply system and a method for supplying a lot are provided to protect a product lot from dust by substituting measurement of a reference lot for measurement of a product lot and reflecting a measured result of the reference lot on a log of the product lot. CONSTITUTION: A counter(14) counts the lot number of products supplied to each processing device(17-1,17-2,17-3). A supply control device(13) transfers a reference lot preserved in a stocker(11) to the processing devices(17-1,17-2,17-3) and initializes the counting value of the counter(14) when a counting value of the counter(14) becomes a set value. A log memory device(16) reflects data measured in a measurement device(18) on a log of the processed product lot.
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