发明名称 Ultrasonic washing apparatus
摘要 A sensor chamber is formed a side portion of a liquid supply inlet of a housing, a sound pressure sensor is mounted in the sensor chamber, ultrasonic waves from an ultrasonic vibrator provided in the housing are detected by the sound pressure sensor, and a defect of the ultrasonic vibrator is detected when the output of the sound pressure sensor becomes less than a predetermined value.
申请公布号 US6189547(B1) 申请公布日期 2001.02.20
申请号 US19990329396 申请日期 1999.06.10
申请人 HONDA ELECTRONICS CO., LTD. 发明人 MIYAMOTO TOSHIAKI;SANO SHUICH
分类号 H01L21/00;(IPC1-7):B08B3/10 主分类号 H01L21/00
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