| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyor that can accommodate to both so to say transverse-feed and longitudinal-feed processors. SOLUTION: A substrate holding member has a first or wide holding part 55, 56 that has opposite side walls 55a and 56a spaced at an interval corresponding to the length of the long sides of substrates and that can hold the substrates when their long sides extend in the direction of opposition of the side walls 55a and 56a, and a second holding part 57, 58 narrower than the first holding part 55, 56, which has opposite side walls or steps 53a and 54a spaced at an interval according to the length of the shorter sides of the substrates and that can hold the substrates when their shorter sides extend in the direction of opposition of the steps 53a and 54a. For a conveyance-associated processor of a transverse-feed type, substrate orientation control means position a glass substrate over the holding member and turn it to set one of its long sides in opposition to the inlet or outlet opening of the processor and lowers it. |
