| 摘要 |
PROBLEM TO BE SOLVED: To enable corona pre-ionizing electrodes for gas laser, composed of a first electrode coated with a dielectric substance and a wire-like second electrode to efficiently and stably make uniform corona pre-ionization at a high strength, by maintaining concentration of electric field. SOLUTION: Corona pre-ionizing electrodes are composed of a first electrode 7, which is arranged together with a pair of main discharge electrodes 3 and 4 used for exciting a laser gas by ionization in a gas laser and coated with a dielectric substance 8, and a second electrode composed of a conductive wire 9 which are arranged around the electrode 7, in a state where the wire 9 is brought into contact with the external surface of the substance 8 and positioned near either one of the discharge electrodes 3 and 4. In this case, a groove 10 is provided as a displacement preventing means for preventing the wire 9 from being displaced from the external surface of the substance 8. |
