| 摘要 |
PROBLEM TO BE SOLVED: To produce a metal oxide small in particle size, uniform, and low in amorphous component by supplying a metal halide-containing gas to a reaction zone so as to obtain turbulent flow, allowing the gas to contact water generated by the combustion reaction of the fuel gas supplied separately and oxygen-containing gas to be subjected to hydrolyzing reaction by heating at a specified temperature. SOLUTION: A soln. of the metal halide (titanium tetrachloride, silicon tetrachloride, or the like) is evaporated by heating to 160-400 deg.C at an evaporator, and the obtained gaseous metal halide is mixed with an inert gas (nitrogen, or the like) in a mixing ratio (wt. ratio) of (0.5:1)-(5:1) and the mixture is supplied to the reaction zone at a speed of 30-300 m/sec in turbulent flow state or turbulent flow transition state. On the other hand, the water generated by the combustion reaction of the fuel gas (methane, ethane, or the like) supplied separately and the oxygen-containing gas is brought into contact with the gaseous metal halide at the reaction zone and hydrolyzed by heating at 400-1500 deg.C to produce the metal oxide (titanium oxide or the like).
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