发明名称 Method/structure for creating aluminum wirebound pad on copper BEOL
摘要 The present invention provides a method for fabricating an integrated circuit (IC) structure having an Al contact in electrical communication with Cu wiring embedded in the initial semiconductor wafer. In accordance with the method of the present invention, the Al contact is formed in areas of the IC structure which contain or do not contain an underlying region of Cu wiring. The present invention also provides a method of interconnecting the fabricated structure to a semiconducting packaging material through the use of a wirebond or Controlled Collapse Chip Connection (C4) solder.
申请公布号 US6187680(B1) 申请公布日期 2001.02.13
申请号 US19980167834 申请日期 1998.10.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COSTRINI GREGORY;GOLDBLATT RONALD DEAN;HEIDENREICH, III JOHN EDWARD;MCDEVITT THOMAS LEDDY
分类号 H01L23/50;H01L21/60;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L23/50
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