摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring device capable of obtaining three- dimensional position information with high accuracy, and of miniaturization. SOLUTION: In an optical sensor where a light beam is projected to a measurement area, the reflected light and scattered light are converged or imaged on a position detecting element to form a light spot, and the displacement of the measurement area is measured by a trigonometrical survey system based on the position data, a marker 10, of which the central part 10a is a diffused reflection part and the peripheral surface 10b is regular reflection part, is installed in the measurement area, a parallel light beam La is projected from an already-known angle so that the central part 10a of the marker is include in this light beam, the reflected light from the central part of the marker and the scattered light from the peripheral surface 10b are received by inclination detecting parts 3, 4 having an angle detecting optical system for angle detection, and information on the position and inclination of the marker 10 are detected based on the position information of these converged light spots.
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