X-ray scanning method and apparatus

摘要

A method for scanning an x-ray target in a reverse geometry x-ray imaging system with a charged particle beam is disclosed. An aspect of the invention is directed to scanning patterns for moving an electron beam across the target assembly to generate x-rays, in which a charged particle beam is moved across a plurality of sets of positions on a target assembly, wherein particular positions or sets of positions on the target assembly are rescanned a plurality of times during a single frame. The length of time between a first and a last illumination of the object during the frame is sufficiently small to prevent image blurring during image reconstruction.