| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply device capable of supplying plural types of sample gases to equipment in the same conditions. SOLUTION: This gas supply device includes gas supply passages 11-15 connected to gas supply parts G1-G5, an equipment connection passage 10 having one end connected to an analyzer A, branch passages 21-25 radially branching from the other end of the equipment connection passage 10 and connected to the gas supply passages 11-15, respectively, and exhaust passages 31-35 connected to the gas supply passages, respectively. The branch passages 21-25 are formed with pipes having almost the same length and inner diameter and made to radially branch an almost equal angle and space from the other end of the equipment connection passage 10, and flow control means F1-F5 are provided in the exhaust passages 31-35, respectively, or cutoff valves in the branch passages, respectively.
|
