发明名称 Ion source
摘要 An ion source is provided that is constructed for use with a magnet that produces magnetic flux lines extending in a predetermined direction and a source of ionizable material for creating ion. The ion source includes a chamber, defined by walls, and a relatively narrow outlet aperture for ions produced in the chamber to leave the chamber. The chamber encloses a cathode and an anode spaced from the cathode and from the walls of the chamber. The anode is positioned with respect to the aperture, the cathode and the predetermined direction of the magnetic flux to cause ions produced in the chamber to drift in crossed magnetic and electric fields so as to concentrate near the aperture.
申请公布号 US6184532(B1) 申请公布日期 2001.02.06
申请号 US19980083814 申请日期 1998.05.22
申请人 EBARA CORPORATION 发明人 DUDNIKOV VADIM G.;NASSER-GHODSI MEHRAN
分类号 C23C14/48;H01J27/08;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/08;H01J37/30 主分类号 C23C14/48
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