| 摘要 |
PROBLEM TO BE SOLVED: To enable the axial center of a cavity to be easily, quickly, and efficiently aligned with the optical axis of a laser beam and enhanced in alignment accuracy. SOLUTION: A cavity standard 11, equipped with position detectors 21, is mounted and fixed on the top surface of an optical platen 6, a returning mirror is adjusted in an angle of inclination, so as to enable the optical axis of a laser beam to pass through the origin 27 of the position detector 21 of the cavity standard 11, then the cavity standard 11 is removed from the optical platen 6, an separable alignment base where a cavity provided with a position detector is installed is arranged and fixed on the optical platen 6 at a position where the cavity standard 11 is installed, the position detector detects whether the optical axis of the laser beam is aligned with the origin of the position detector, and when it is found that the optical axis is not aligned with the origin, a shim is inserted between the separable alignment base and the optical platen 6 at a prescribed position, by which the axial center of the cavity is adjusted in height and lateral position.
|
