DISPLACEMENT MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a displacement measuring apparatus which is so constituted that a return light does not exist and the size of the whole apparatus does not become large. SOLUTION: In this displacement measuring apparatus, a semiconductor laser 5, a photodiode 6 for detection and an optical waveguide 3 are constituted in a unified body on a base substrate 1. The base substrate 1 is an inclined base substrate and has a terrace 2 in the front vicinity of the semiconductor laser 5 or an output end surface of the optical waveguide 3. A beam outputted from the output end surface is prevented from being reflected by a reflecting mirror 7 arranged in the outside and returning again to the output end surface.