THERMAL AIR FLOW RATE SENSOR AND CONTROLLER FOR INTERNAL COMBUSTION ENGINE

摘要

PROBLEM TO BE SOLVED: To provide a thermal air flow rate sensor having high reliability and enhanced measurement accuracy. SOLUTION: The thermal air flow sensor comprises heaters 4 and a plurality of temperature measuring resistors 5a, 5b, 6 formed of a semiconductor thin film 2b of doped single crystal silicon(Si) on a semiconductor substrate 2a through an electric insulating film. Longitudinal direction of the patterned resistor is substantially aligned with the direction of the semiconductor thin film 2b where the piezoelectric coefficient is minimized in order to suppress the effect of stress generated during the manufacturing process thus enhancing high reliability.