| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the viscoelasticity distribution of a sample that is flexible and can be deformed easily using a scanning-type probe microscope by relatively vibrating the sample and the probe, modulating force between the sample and probe, and obtaining elasticity from the amplitude of the vibration of the probe that changes based on the force modulation. SOLUTION: A vibration part 3 of a scanning-type probe microscope 1 vibrates a cantilever with a frequency close to a resonance frequency. Also, a displacement detection part 2 has a vibration part for measuring viscoelasticity. Also, the vibration frequency of the vibration part 3 differs from that of a vibration part for measuring viscoelasticity. The output signal of the displacement detection part 2 includes a signal that is related to surface shape and viscoelasticity. Then, a signal separation part 4 separates the frequency of a signal related to the surface shape from that being related to viscoelasticity. A signal (high-frequency component) related to the surface shape is fed back to the side of the displacement detection part 2 via a feedback control part 5 for scanning in a dynamic mode. On the other hand, a signal (low-frequency component) related to viscoelasticity measures elasticity and/or viscosity by a viscoelasticity measurement part 6.
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