| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film thermistor element wherein dispersion in the resistance, etc., is suppressed for higher precision, while high-temperature durability is improved for higher reliability. SOLUTION: On a base material substrate 12 comprising alimina, a base material layer 16, a thermistor thin-film 13, and a pair of comb-like electrodes 14 and 15 comprising a Pt thin-film are formed. This thermistor thin-film 13 comprises, for example, a composite oxide of Mn-Co-Ni, having a spinel-type crystal structure which is preferentially oriented in the (100) face, that is oriented mainly in the (100) face. The base material layer 16 is formed by sputtering in argon gas atmosphere, while the thermistor thin-film 13 is formed by the sputtering in the mixed gas atmosphere comprising argon and oxygen.
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