| 摘要 |
PROBLEM TO BE SOLVED: To realize highly accurate sample alignment with excellent workability for a short working time. SOLUTION: An X-ray detector for irradiating the surface of a sample with X-rays to detect reflected X-rays from the surface of the sample at a predetermined angle position is fixedly provided. Subsequently, the angleϕof rotation of the sample is set to an arbitrary angleϕn of rotation and the flapping angleωof the sample is adjusted to measure the flapping angleωn at a time when the X-ray detector detects reflected X-rays. This operation is repeated at least three times at different anglesϕn of rotation. The inclination of the surface of the sample is calculated on the basis of the relation between the angleϕof rotation, the flapping angleωand the inclination of the surface of the sample to a predetermined reference surface by using the angleϕn of rotation set by this operation and the measured flapping angleωn to be corrected.
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