| 摘要 |
PROBLEM TO BE SOLVED: To make realizable speedup of an defect countermeasure working such as a review, by excluding fallacious data in a visual inspection therefrom. SOLUTION: To defective data which include a plurality of defective information obtained by a visual inspection (step 101), clustering for identifying as a group clustered defect-groups is executed (step 102). Thereafter, by calculating correlation coefficientsγof the defect groups based on their coordinates in the individual group (step 104), and by calculating the correlation coefficientsγ' of the defect-groups based on their coordinates (step 106) obtained after their coordinate transformations (step 105), whether the individual group is a fallacious information is discriminated based on the correlation coefficientsγ,γ' (step 107). Hereupon, when this is fallacious information, processings for giving additionally identifying informations to the defective data included in the individual group (step 108) are performed with respect to all the groups (step 109). Then, after excluding from the groups the defective data discriminated as being fallacious information (step 110), reviews of causal analysis of defects are executed (step 111).
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