Nickel cathodic sputtering target, for producing anodic electrochromic nickel alloy oxide film for electrochromic glazing, display panels or mirrors, contains ferromagnetism reducing or eliminating element addition

摘要

A cathodic sputtering target, comprising nickel alloyed with one or more elements for reducing or eliminating ferromagnetism, is new. Independent claims are also included for the following: (i) production of a nickel alloy oxide thin film by magnetic field-assisted cathodic sputtering of the above target in an oxidizing atmosphere; and (ii) an electrochromic device having an active layer produced by the above process and/or from the above target.