PATTERN COMPARISION INSPECTION SYSTEM AND METHOD EMPLOYING GRAY LEVEL BIT MAP,申请号KR19970019686-传众专利搜索

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发明名称	PATTERN COMPARISION INSPECTION SYSTEM AND METHOD EMPLOYING GRAY LEVEL BIT MAP
摘要
申请公布号	KR100272940(B1)	申请公布日期	2000.11.15
申请号	KR19970019686	申请日期	1997.05.21
申请人	MITSUBISHI DENKI KABUSHIKI KAISHA	发明人	KANNO, MAKOTO;MORIIZUMI, KOICHI
分类号	H01L21/027;G03F1/00;G06F17/50;H01J37/302;(IPC1-7):H01J37/305	主分类号	H01L21/027
代理机构		代理人
主权项
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