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发明名称
METHOD FOR FORMING A CRITICAL DIMENSION TEST STRUCTURE AND ITS USE
摘要
申请公布号
EP1051664(A1)
申请公布日期
2000.11.15
申请号
EP19990949992
申请日期
1999.09.28
申请人
NIKON PRECISION INC.;NIKON CORPORATION
发明人
GRODNENSKY, ILYA;SUWA, KYOICHI;USHIDA, KAZUO;JOHNSON, ERIC, R.
分类号
G03B27/72;G03C5/00;G03F7/20;(IPC1-7):G03B27/72
主分类号
G03B27/72
代理机构
代理人
主权项
地址
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