TRIPOLAR CHUCK APPARATUS OF SEMICONDUCTOR ETCH EQUIPMENT,申请号KR1019980003399-传众专利搜索

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发明名称	TRIPOLAR CHUCK APPARATUS OF SEMICONDUCTOR ETCH EQUIPMENT
摘要
申请公布号	KR100280443(B1)	申请公布日期	2000.11.10
申请号	KR1019980003399	申请日期	1998.02.06
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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