发明名称 GRATING ASSEMBLY HAVING TWO-DIRECTIONAL BAND WIDTH CONTROL
摘要 PROBLEM TO BE SOLVED: To provide a two-directional width control grating assembly. SOLUTION: A two-directional band width control grating assembly 60 is provided. A spring housing is connected to one of two end plates 2 which extend away from the line surface of a grating 1. An adjustment rod 4 threaded via the other end plate is extended within the spring housing. A compression spring 11, mounted between a pressure surface within the housing and a piston fixed to the rod 4, is provided within the housing. By rotating the rod in a direction toward the inside of the housing having a spring to be pushed to separate the end plates, a recess on the line surface of the grating 1 can be enlarged (or protrusion can be made smaller), and by rotating the rod in the outward direction of the housing having another spring to push the end plates toward each other, the protrusion (or the recess) of the surface can be enlarged (or be made smaller).
申请公布号 JP2000312048(A) 申请公布日期 2000.11.07
申请号 JP20000077241 申请日期 2000.02.14
申请人 CYMER INC 发明人 FOMENKOV IGOR V;ERIE FREDERICK G;ERSHOV ALEXANDER
分类号 H01S3/08;G02B5/18;G03F7/20;H01S3/1055;H01S3/13;H01S3/137;H01S3/225;(IPC1-7):H01S3/105 主分类号 H01S3/08
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